A multi-mode digital holographic microscope
نویسندگان
چکیده
منابع مشابه
Mems Measurement by Digital Holographic Microscope
A universal digital holographic microscope to measure shape and displacement of microelement and MEMS (MicroElectroMechnacalSystems) is presented. This device is designed to exploit a measurement for MEMS with either a smooth or a rough surface. The method is based on digital laser interferometry and digital laser speckle interferometry (TV holography) incorporated with optoelectronic devices i...
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ژورنال
عنوان ژورنال: Review of Scientific Instruments
سال: 2019
ISSN: 0034-6748,1089-7623
DOI: 10.1063/1.5066556